http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4979576-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2006-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4979576-B2 |
| titleOfInvention | Plasma doping method and plasma processing apparatus |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101390963-B1 |
| priorityDate | 2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.