http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4944982-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2010-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4944982-B2 |
| titleOfInvention | Semiconductor wafer inspection method and semiconductor device manufacturing method |
| priorityDate | 2010-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609 |
Total number of triples: 12.