http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4936621-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4936621-B2 |
| titleOfInvention | Process chamber of film forming apparatus, film forming apparatus and film forming method |
| priorityDate | 2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.