http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4919337-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2006-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4919337-B2 |
| titleOfInvention | Cleaning sheet, conveying member with cleaning function, and cleaning method for substrate processing apparatus |
| priorityDate | 2005-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 161.