http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4888768-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2006-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4888768-B2 |
| titleOfInvention | Substrate exposure apparatus and substrate exposure method |
| priorityDate | 2006-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 |
Total number of triples: 12.