| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45572
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2006-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2012-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4873405-B2 |
| titleOfInvention |
Plasma processing apparatus and method |
| priorityDate |
2006-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |