http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4871442-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 |
| filingDate | 2000-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4871442-B2 |
| titleOfInvention | Dense hard thin film forming apparatus and hard thin film forming method |
| priorityDate | 2000-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.