Predicate |
Object |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G15-043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N1-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-00 |
filingDate |
2007-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2012-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2012-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-4867673-B2 |
titleOfInvention |
Light quantity measuring device for exposure apparatus and exposure apparatus |
priorityDate |
2007-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |