http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4825811-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2005-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4825811-B2 |
| titleOfInvention | Antireflection film forming method, resist image forming method, pattern forming method, and electronic device manufacturing method |
| priorityDate | 2004-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.