http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4820007-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2001-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4820007-B2 |
| titleOfInvention | Method for transporting workpieces |
| abstract | PROBLEM TO BE SOLVED: To provide a method for carrying a substance to be processed, in which an actual load port does not provide a extra space and can load the substance to be processed as if there are a plurality of load ports even if the number of the actual load port is the one to thereby prevent a foot print increase and a cost increase. SOLUTION: The method for carrying the substance to be processed is the one for carrying a wafer W to a prober 2 from an AGV 3, that is, to set at least one imaginary load port 23V other than the actual load port (adapter) 23 of the prober 2 at the prober 2 by use of optical coupling PIO communications, to search a place other than the adapter 3, to store the water W at the place, and then to carry the wafer to the adapter 23. |
| priorityDate | 2001-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 16.