http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4810355-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2006-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4810355-B2 |
| titleOfInvention | Processing gas supply method, substrate processing method, semiconductor device manufacturing method, processing gas supply device, substrate processing apparatus, and recording medium |
| priorityDate | 2006-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.