http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4800257-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
| filingDate | 2007-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4800257-B2 |
| titleOfInvention | Manufacturing method of semiconductor integrated circuit device |
| priorityDate | 1995-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437 |
Total number of triples: 17.