http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4780866-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 |
filingDate | 2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4780866-B2 |
titleOfInvention | Raw material for chemical vapor deposition and method for producing thin film using the same |
priorityDate | 2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 149.