http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4745137-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2006-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4745137-B2 |
| titleOfInvention | Thin film forming raw material, thin film manufacturing method, and hafnium compound |
| priorityDate | 2006-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 154.