http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4728757-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4728757-B2 |
| titleOfInvention | Semiconductor manufacturing method and semiconductor manufacturing apparatus |
| priorityDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.