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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
filingDate 2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2011-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2011-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-4715149-B2
titleOfInvention Method for manufacturing thin film semiconductor device
priorityDate 2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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