| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45589
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-385 |
| filingDate |
2005-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2011-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4689404-B2 |
| titleOfInvention |
Substrate processing apparatus, substrate processing method using the same, electron source substrate processing apparatus, and electron source substrate processing method using the same |
| priorityDate |
2005-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |