| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J15-0616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B47-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B47-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-00 |
| filingDate |
2000-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2011-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4641345-B2 |
| titleOfInvention |
Carrier head with substrate detector |
| priorityDate |
1999-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |