http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4614291-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 |
| filingDate | 2008-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4614291-B2 |
| titleOfInvention | Halftone phase shift mask blank and halftone phase shift mask manufactured using the same |
| priorityDate | 2002-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.