http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4609878-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-12 |
| filingDate | 2004-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4609878-B2 |
| titleOfInvention | Resist upper layer film forming material and resist pattern forming method using the same |
| priorityDate | 2003-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 130.