http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4606554-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
filingDate | 2000-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4606554-B2 |
titleOfInvention | Film forming method and film forming apparatus |
priorityDate | 1999-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.