http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4602035-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2004-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4602035-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9773823-B2 |
| priorityDate | 2002-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.