http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4601941-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4601941-B2 |
| titleOfInvention | Method for manufacturing transfer mask for charged particle beam and transfer mask for charged particle beam |
| priorityDate | 2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.