Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
filingDate |
2000-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2010-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2010-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-4592885-B2 |
titleOfInvention |
Semiconductor substrate testing equipment |
priorityDate |
2000-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |