| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22B5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22B5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2006-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4579181-B2 |
| titleOfInvention |
Wiring reduction method in multilayer wiring, multilayer wiring manufacturing method, and semiconductor device manufacturing method |
| priorityDate |
2006-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |