| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 |
| filingDate |
2000-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4572444-B2 |
| titleOfInvention |
Film forming composition, film forming method, and silica-based film |
| priorityDate |
2000-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |