| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2008-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4534175-B2 |
| titleOfInvention |
Substrate manufacturing method |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101980617-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180079264-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101874901-B1 |
| priorityDate |
2007-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |