| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G55-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-02 |
| filingDate |
2000-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4510979-B2 |
| titleOfInvention |
Method for using ruthenium or ruthenium oxide removing liquid and method for removing ruthenium or ruthenium oxide |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11239093-B2 |
| priorityDate |
2000-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |