http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4501379-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 |
| filingDate | 2003-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4501379-B2 |
| titleOfInvention | Method for forming ruthenium-silicon mixed film |
| priorityDate | 2003-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 115.