http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4439030-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 1999-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4439030-B2 |
| titleOfInvention | Vaporizer, processing apparatus, processing method, and semiconductor chip manufacturing method |
| priorityDate | 1999-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.