| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
1999-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4428473-B2 |
| titleOfInvention |
Method for producing water-containing solid substance of vapor-phase inorganic oxide particles and polishing slurry |
| priorityDate |
1999-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |