http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4426671-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-40 |
| filingDate | 1999-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4426671-B2 |
| titleOfInvention | Heat treatment apparatus and cleaning method thereof |
| priorityDate | 1998-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.