http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4409862-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2003-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4409862-B2 |
| titleOfInvention | EUV radiation source that generates extreme ultraviolet (EUV) radiation |
| priorityDate | 2002-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.