http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4396088-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2002-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4396088-B2 |
| titleOfInvention | Atmospheric pressure plasma processing apparatus and atmospheric pressure plasma processing method |
| priorityDate | 2001-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 93.