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filingDate 2003-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-4362347-B2
titleOfInvention Lithographic marker structure, lithographic projection apparatus comprising such a lithographic marker structure and method for aligning a substrate using such a lithographic marker structure
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