http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4333480-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G83-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-21 |
| filingDate | 2004-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4333480-B2 |
| titleOfInvention | Si-containing film forming material and use thereof |
| priorityDate | 2004-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 80.