patent/JP-4278982-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4278982-B2

Outgoing Links

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classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H11-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-482 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
filingDate	2002-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2009-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2009-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-4278982-B2
titleOfInvention	Method for fabricating a microelectronic spring structure on a substrate
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101746975-B1
priorityDate	2001-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
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Total number of triples: 66.