| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-1575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2000-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4273283-B2 |
| titleOfInvention |
Fine pattern forming material, fine plating pattern forming method using the same, and semiconductor device manufacturing method |
| priorityDate |
2000-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |