http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4266956-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13609 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 |
| filingDate | 2005-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4266956-B2 |
| titleOfInvention | Semiconductor device manufacturing method and manufacturing apparatus |
| priorityDate | 2005-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.