| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-441 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62805 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C24-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 |
| filingDate |
2003-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4241287-B2 |
| titleOfInvention |
Method for manufacturing aluminum nitride (AlN) substrate |
| priorityDate |
2002-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |