| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
1999-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4198820-B2 |
| titleOfInvention |
Aluminum complex derivative for chemical vapor deposition and method for producing the same |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014027861-A1 |
| priorityDate |
1998-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |