http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4165138-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2002-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4165138-B2 |
| titleOfInvention | Chemical amplification resist solution manufacturing apparatus and chemical amplification resist solution manufacturing method using the apparatus |
| priorityDate | 2002-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.