http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4160317-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 |
| filingDate | 2002-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4160317-B2 |
| titleOfInvention | Insulating film manufacturing method and semiconductor device manufacturing method |
| priorityDate | 2001-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.