http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4137834-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
filingDate | 2004-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4137834-B2 |
titleOfInvention | Semiconductor device inspection equipment (INSPECTINGAPPAPARATUSFORSEMICONDUCTORDEVICE) |
priorityDate | 2003-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 |
Total number of triples: 14.