http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4133589-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4133589-B2 |
| titleOfInvention | Tetrakis (ethylmethylamino) vanadium, method for producing the same, and method for forming a vanadium nitride film using the same |
| priorityDate | 2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.