patent/JP-4115545-B2

Predicate	Object
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-347 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32055
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-50
filingDate	1996-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2008-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2008-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-4115545-B2
titleOfInvention	Method for reactively processing a workpiece, vacuum processing apparatus, and use of the same and apparatus
priorityDate	1995-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545318 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524000 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61697 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327614

Total number of triples: 26.