http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4102923-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D249-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D253-08 |
| filingDate | 2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4102923-B2 |
| titleOfInvention | Positive-type radiation-sensitive resin composition for semiconductor device manufacturing |
| priorityDate | 2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 763.