http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4101591-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2008-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2008-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4101591-B2 |
titleOfInvention | Chemical amplification type photoresist composition for thick film, thick film photoresist laminate, method for producing thick film resist pattern, and method for producing connection terminal |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7961949-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7970167-B2 |
priorityDate | 2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 131.