http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4091014-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14 |
| filingDate | 2004-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4091014-B2 |
| titleOfInvention | Semiconductor device cleaning method and semiconductor device manufacturing apparatus cleaning method and cleaning device |
| priorityDate | 2003-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.