http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4022518-B2
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate | 2002-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4022518-B2 |
titleOfInvention | Probe contact system having a planar adjustment mechanism |
abstract | A probe contact system for adjusting the distance between the tip end of a contactor and a contact target by means of a simple, low−cost mechanism. This plane adjusting mechanism comprises a contact substrate having many contactors, a probe card for forming an electric connection between contactors and the test head of a semiconductor test system, a probe card ring provided between the probe card and the frame of the probe contact system for mechanical connection between them, and a connection member for connecting the probe card with the probe card ring at three−point positions on the probe card and being rotated so as to be able to adjust the distance between the probe card and the probe card ring. In another embodiment, a required number of shims are inserted to adjust the distance between the probe card and the probe card ring. |
priorityDate | 2001-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226 |
Total number of triples: 17.